Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Lapmaster 48, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 48Lapmaster | |
|---|---|---|
| OEM | ABM | Lapmaster |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Lapmaster 48 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Machine type | — | Floor-standing single-sided machinery[3] |
| Lapping plate diameter | — | 48 inches (1219 mm)[3] |
| Lapping plate material | — | Cast iron[3] |
| No. of conditioning rings | — | 4[3] |
| Drive motor | — | 7.5 kW[3] |
| Weight | — | 3357 kg[3] |
| Shipping weight | — | 3748 kg[3] |
| Standard lap plate speed | — | 48 rpm[1] |
| Lapping plate O.D. | — | 48 inches (1219 mm)[1] |
| Lapping plate I.D. | — | 13 inches (330 mm)[1] |
| Conditioning ring O.D. | — | 20 inches (508 mm)[1] |
| Conditioning ring I.D. | — | 17 inches (432 mm)[1] |
| Power supply | — | 230 V/460 V, 3 phase, 60 Hz[1] |
| Polishing plate | — | Ø 48 inch (1219 mm) cast iron polishing plate[4] |
| Versions | — | Open face (OF) and pneumatic lift (PL)[4] |
| Motor | — | 10 hp / 7.5 kW; pneumatic lift version: 14.75 hp / 11 kW[4] |