Comparison ledger
ABM -407B-2-S-CE-S293 Robot, KLA M Gage 300 Film Thickness, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | KLA M Gage 300 Film Thickness |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Measurement principle | — | Non-contact Eddy Current measurement[2] |
| Sheet resistance range | — | 1 ohm/sq to 1,999 ohm/sq; 1 mOhm/sq to 1,999 mOhm/sq[2] |
| Film thickness range | — | 100 Angstroms min to 270K Angstroms (calculated by DDC when resistivity is 2.7 uOhm-cm)[2] |
| Substrate diameter | — | 2”, 3”,4”,5”,6” standard wafers; 150mm (6”) wafers[3] |
| Substrate thickness | — | 200mm to 1000mm[3] |
| Repeatability | — | Total repeatability is the standard deviation percent of mean value, +/-1 count: 1 to 100 mOhm/sq and Ohm/sq: 1.0%; 100 to 500: 2.0%; 500 to 1,000: 4.0%; 1,000 to 1,999: 6.0%[3] |
| Display | — | 3 ½ Digit LED display, autoranges over three decades[2] |
| Measurement modes | — | Manual and Automatic modes; 5-point and 9-point multi-point measurements supported[3] |
| Units of measurement | — | Ohms per square or milliohms per square, switch selectable[2] |
| Resistivity range | — | 0.05 mOhm-cm to 100 mOhm-cm or 0.05 Ohm-cm to 100 Ohm-cm (for a 500 micrometer wafer)[3] |
| Power requirements | — | 110Vac, 50-60Hz, <15A[2] |
| Dimensions | — | Tester: 24cm (9.5”)W x 19cm (7”)H x 39cm (15.5”)D[2] |