Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards EPX 500 LE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPX 500 LEEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards EPX 500 LE |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | EPX 500 LE[4] |
| Description | ROBOT[1] | all-in-one atmosphere-to-hiVac dry vacuum pump[3] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Ultimate vacuum | — | < 7 x 10^-7 Torr[2] |
| Pumping speed | — | 295 CFM[2] |
| Inlet flange | — | ISO63[2] |
| Exhaust flange | — | KF25[2] |
| Weight | — | 99 lbs[2] |
| Electrical supply | — | 208 VAC 3PH[3] |
| Water connector size | — | 3/8 in.[3] |
| Inlet size (alternative) | — | ISO 160[3] |
| Part number (without TIM) | — | A41953012[3] |
| Operating pressure range | — | Atmosphere to < 7 x 10^-7 Torr[3] |
| OEM | — | Edwards[4] |
| Type | — | dry pump[2] |
| Inlet | — | ISO 160[3] |
| Power | — | 208 VAC, 3-phase[3] |
| Type of product | — | dry pump[2] |
| Exhaust | — | KF25[2] |
| Power supply | — | 208 VAC 3PH[3] |
| Water connector | — | 3/8 in.[3] |
| Manufacturer | — | Edwards[4] |
| Product description | — | all-in-one atmosphere-to-hiVac dry vacuum pump[3] |
| Series feature | — | End User Controller (EUC)[3] |