Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards EMF 20 Oil Mist Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EMF 20 Oil Mist FilterEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards EMF 20 Oil Mist Filter |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | EMF 20[2] |
| Description | ROBOT[1] | Oil Mist Exhaust Filter[4] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Make | — | Edwards[2] |
| Item number | — | A462-29-000[3] |
| Part number | — | P102663[4] |
| Type | — | Oil Mist Filter[2] |
| Inlet & exhaust flanges | — | ISO KF25 (NW25)[4] |
| Fits pump models | — | RV12, E1M18, E2M18[4] |
| Suitable for | — | Edwards rotary vane pumps up to E2M18[4] |
| Dimensions | — | Height 7.5 x Width 5 inches[4] |
| Weight | — | 1.5 lb[4] |
| Body material | — | Durable plastic body[4] |
| Odor filter element | — | Activated carbon[4] |
| Oil filter element | — | Epoxy impregnated glass fiber[4] |
| Supplied fittings | — | NW25 clamp, centering ring, O-ring, NW25 to 3/4 BSP adapter, 1 oil element filter, and 1 odor element[4] |
| Performance | — | 99.999% DOP test efficiency[4] |
| Protection feature | — | Integral pressure relief valve opens if the oil element becomes blocked[4] |
| Feature | — | Azide proof[4] |
| Body | — | White bottom half is semi-transparent for oil level monitoring[4] |