Comparison ledger
ABM -407B-1-S-CES293 Robot, Thermotron SM 32 C Temperature Humidity, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SM 32 C Temperature HumidityThermotron | |
|---|---|---|
| OEM | ABM | Thermotron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Thermotron SM 32 C Temperature Humidity |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | Chamber 1[2] |
| Temperature Range | — | -70 to +170 Deg. C –[2] |
| Power | — | 208V, 3Ph, 48.2 Amps[2] |
| Interior dimensions (W x D x H) | — | 38"W x 38"D x 38"H[2] |
| Exterior dimensions (W x D x H) | — | 58"W x 64"D x 88"H[2] |
| Cooling | — | Air Cooled[2] |
| Humidity range | — | 20% to 95%[2] |
| Purge | — | GN2 Purge[2] |
| Controller | — | Thermotron Model 8200 Touchscreen Control[2] |
| Refrigerants | — | Environmentally Friendly Refrigerants[2] |
| Interior | — | Stainless Steel Interior[2] |
| Features | — | Viewing Window, Interior Light, Castors, 1 Shelf[2] |
| Feed-thru ports | — | 2x 3.75" Opposing Side Feed-Thru Ports[2] |