Comparison ledger
ABM -407B-1-S-CES293 Robot, SCREEN SU 3200 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | SCREEN |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | SCREEN SU 3200 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | 12 Chamber Aquaspin[2] |
| Factory Interface | — | FOUP (4)[2] |
| Handler System | — | Kawasaki[2] |
| Software Version | — | Standard[2] |
| CIM | — | SECS / GEMS[2] |
| Process | — | SOM / SPM / SC1/ SC2 / 03W / DHF[2] |
| Software version | — | P2485STD00V2485STD00[3] |
| System power rating | — | 208AC-3 Phase[3] |
| Wafer size | — | 12 inch (300 mm)[2] |
| Maximum chambers | — | 12 chambers in four three-level towers[4] |
| Throughput | — | up to 800 wafers per hour (WPH)[4] |
| Chemical supply options | — | dynamic direct injection (DDI) or cabinet-type chemical supply system[4] |
| Chamber volume reduction | — | about one-third of the previous model[4] |
| Processes | — | SOM / SPM / SC1/ SC2 / 03W / DHF[2] |
| Power rating | — | 208AC-3 Phase[3] |