Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer Adixen ASM 182 TD+ Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | –2025 |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer Adixen |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | ASM 182 TD+[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| P/N | — | D 70 RTS 0 PB 710[2] |
| Manufacturer | — | Pfeiffer Vacuum[3] |
| Detection method | — | Vacuum and Sniffing Leak Detection[4] |
| Pumping speed for He | — | 4.4 l/s[4] |
| Backing pump capacity | — | 25 m^3/h[4] |
| Backing pump | — | Oil-Free Backing Pump[4] |
| Flange model (inlet) | — | DN 40 ISO-KF[4] |
| Supply | — | 110–130 V, 50/60 Hz[4] |
| Language | — | English[4] |
| Mains cable | — | US power cable[4] |
| Dimensions (L x W x H) | — | 601 x 487 x 456 mm[4] |
| Weight | — | 88 kg[4] |
| Minimum detectable leak rate for helium (sniffing leak detection) | — | 1 x 10^-8 Pa m3/s[4] |
| Minimum detectable leak rate for helium (vacuum leak detection) | — | 5 x 10^-13 Pa m3/s[4] |
| Noise level | — | 65 dB(A)[4] |
| Power consumption max. | — | 1500 W[4] |
| Start-up time with calibration | — | < 5.5 min[4] |
| Start-up time without calibration | — | < 4 min[4] |
| User interface | — | Basic User Interface[4] |
| Test method | — | Vacuum and Sniffing Leak Detection[4] |
| Type | — | High Performance - Compact[4] |